Comparative analyses of plasma probe diagnostics techniques
نویسندگان
چکیده
منابع مشابه
Optical Techniques in Plasma Diagnostics
Recent developments in optical techniques for plasma diagnostics are critically reviewed. The primary emphasis is on plasma-induced emission and laser-induced fluorescence probes of radical and ionic concentrations and temperatures in low pressure discharges like those used in microelectronic fabrication. Other techniques such as optogalvanic, infrared, spontaneous and stimulated Raman, and mul...
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A large volume ~hundreds of cm! plasma is created by a 193 nm laser ionizing an organic vapor, tetrakis~dimethyl-amino!ethylene ~TMAE!. The plasma is characterized as high electron density (10– 10 cm) and low electron temperature ~;0.1 eV!. To investigate the plasma decay processes, a fast Langmuir probe technique is developed, including detailed considerations of probe structure, probe surface...
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ژورنال
عنوان ژورنال: Journal of Applied Physics
سال: 2015
ISSN: 0021-8979,1089-7550
DOI: 10.1063/1.4937446